A 2.5-rad/s2 resolution digital output MEMS-based rotational accelerometer for HDD applications

A. Gola; F. Pasolini; E. Chiesa; E. Lasalandra; M. Tronconi; T. Ungaretti; A. Baschirotto; R. Oboe

doi:10.1109/TMAG.2003.808947

A 2.5-rad/s² resolution digital output MEMS-based rotational accelerometer for HDD applications

A. Gola, F. Pasolini, E. Chiesa, E. Lasalandra, M. Tronconi, T. Ungaretti, A. Baschirotto, R. Oboe

Istituto di Neuroriabilitazione Motoria San Camillo

Research output: Contribution to journal › Article › peer-review

Abstract

A 2.5-rad/s² resolution micro-electro-mechanical system-based rotational accelerometer targeted for hard disk drive (HDD) application is presented. The device is composed by a 0.6-μm BICMOS electronic interface that implements together with the MEMS sensor one single bit electromechanical ΣΔ conversion loop able to detect capacitive unbalancing as low as 50 aF (50 · 10^-18 F). The produced bitstream is then processed by a digital chain and made available through a standard three-wire digital interface. The device is intended for feedforward compensation of external disturbances acting on computer HDDs to steadily keep the read-write heads on track and to allow greater track densities.

Original language	English
Pages (from-to)	915-919
Number of pages	5
Journal	IEEE Transactions on Magnetics
Volume	39
Issue number	2 I
DOIs	https://doi.org/10.1109/TMAG.2003.808947
Publication status	Published - Mar 2003

Keywords

Accelerometer
Capacitive interface
MEMS
Rotational
Vibration compensation

ASJC Scopus subject areas

Electrical and Electronic Engineering
Physics and Astronomy (miscellaneous)

Access to Document

10.1109/TMAG.2003.808947

Cite this

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title = "A 2.5-rad/s2 resolution digital output MEMS-based rotational accelerometer for HDD applications",

abstract = "A 2.5-rad/s2 resolution micro-electro-mechanical system-based rotational accelerometer targeted for hard disk drive (HDD) application is presented. The device is composed by a 0.6-μm BICMOS electronic interface that implements together with the MEMS sensor one single bit electromechanical ΣΔ conversion loop able to detect capacitive unbalancing as low as 50 aF (50 · 10-18 F). The produced bitstream is then processed by a digital chain and made available through a standard three-wire digital interface. The device is intended for feedforward compensation of external disturbances acting on computer HDDs to steadily keep the read-write heads on track and to allow greater track densities.",

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AU - Gola, A.

AU - Pasolini, F.

AU - Chiesa, E.

AU - Lasalandra, E.

AU - Tronconi, M.

AU - Ungaretti, T.

AU - Baschirotto, A.

AU - Oboe, R.

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KW - Vibration compensation

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